Amorphous-Silicon Inter-Layer Grating Couplers With Metal Mirrors Toward 3-D Interconnection

J. Kang, Y. Atsumi, Y. Hayashi, J. Suzuki, Y. Kuno, T. Amemiya, N. Nishiyama, S. Arai, IEEE Journal of Selected Topics in Quantum Electronics, Vol. 20, No. 4, 8202308.