Apodized Amorphous Silicon Grating Coupler with Metal Mirrors for 3D optical Interconnection

Y. Kuno, K. Itoh, Y. Hayashi, J. Suzuki, T. Amemiya, N. Nishiyama, S. Arai, The 11th Conference on Laser and Electro-Optics Pacific Rim (CLEO-PR 2015), 25J1-3, Aug. 2015.