Fabrication of Si Photonics Waveguides by Thick Resist-Mask Electron Beam Lithography Proximity Effect Correction

M. Eissa, T. Mitarai, T. Amemiya, N. Nishiyama, Y. Miyamoto, 32nd International Microprocesses and Nanotechnology Conference (MNC 2019), 30A-7-4, Oct. 2019.