High Efficiency Apodized Grating Couplers with Metal Mirrors between a-Si:H Multilayer Waveguides toward 3D Optical Interconnection

Y. Kuno, J. Kang, Y. Hayashi, J. Suzuki, T. Amemiya, N. Nishiyama, S. Arai, The 46th Solid State Devices and Materials (SSDM 2014), B-2-2, Sep. 2014.