High Efficiency Inter-Layer Amorphous Silicon Grating Couplers with Metal Mirrors for On-Chip 3D Interconnects

J. Kang, Y. Atsumi, Y. Hayashi, J. Suzuki, Y. Kuno, T. Amemiya, N. Nishiyama, S. Arai, 3rd International Symposium on Photonics and Electronics Convergence (ISPEC 2013), P-43, Nov. 2013.