Investigation of InP/Si bonding condition for suppressing degradation of Photoluminescence property using Surface Activated Bonding

Yuning Wang, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai. 第66回応用物理会春季学術講演会, 10a-W331-10, Mar. 2019.