Photoluminescence Properties of GaInAs/InP Layers by Ar Fast Atom Beam for Room Temperature Surface Activated Bonding Toward Hybrid PIC

Y. Wang, K. Nagasaka, J. Suzuki, L. Bai, T. Mitarai, T. Amemiya, N. Nishiyama, S. Arai, Compound Semiconductor Week 2018: 30th International Conference on Indium Phosphide and Related Materials (IPRM 2018), Fr15PP-Opt.12, May 2018.