Fabrication of InGaAs Nanosheet Transistors with Regrown Source

T. Kanazawa, K. Ohsawa, T. Amemiya, N. Kise, R. Aonuma, Y. Miyamoto, Compound Semiconductor Week 2018: 30th International Conference on Indium Phosphide and Related Materials (IPRM 2018), We3C3-2, May 2018.