Wafer-scale fabrication of silicon passive components using UV-nanoimprint lithography
Y. Nakayama, S. Nagamatsu, G. Ichisawa, T. Maekawa, R. Mori, T. Asai, Y. Fujii, D. Shiota, K. Onou, D. Tanabe, T. Amemiya, SPIE Photonics West 2026, Paper 13902-42, Jan. 2026.