Highly Efficient Circular Holes Added a-Si:H Grating Coupler with Metal Mirror for 3D Optical Interconnects

J. Kang, Y. Kuno, K. Ito, Y. Hayashi, J. Suzuki, I. Han, T. Amemiya, N. Nishiyama, S. Arai, The 21th Opto Electronics and Communications Conference (OECC 2016), TuE4-2, Jul. 2016.