Inter-Layer Grating Coupler with Metal Mirrors for 3D Optical Interconnects

J. Kang, Y. Atsumi, T. Sifer, Y. Hayashi, T. Amemiya, N. Nishiyama, S. Arai, The 10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR 2013), MM1-5, Jul. 2013.