A Large-Diameter, High-Throughput Silicon Photonics Process Enabled by UV Nanoimprint Lithography

投稿日 : 2026年7月16日カテゴリー : タグ : 投稿者 : amemiya-lab

Y. Nakayama, S. Nagamatsu, T. Maekawa, R. Mori, Y. Fujii, T. Asai, D. Shiota, K. Oonou, D. Tanabe, T. Amemiya, 25th International Conference on Nanoimprint and Nanoprint Technology (NNT 2026), 14A-3-3, Oct. 2026.